SEOUL, South Korea, July 22, 2026 – ZEISS Semiconductor Manufacturing Technology (SMT) has opened a new Innovation Center in Yongin, South Korea, bringing together systems from its Semiconductor Mask Solutions (SMS) and Semiconductor Fab Solutions (SFS) portfolios. The center covers metrology, inspection and mask repair technology for wafer production and advanced packaging.
The center houses three systems:
- NLX-100: a 3D X-ray metrology and inspection system that provides high-resolution X-ray diagnostics and data on complex package structures, supporting process control in wafer-level and advanced packaging.
- DUNE 100: a wafer shape control system with integrated metrology that measures and corrects global wafer warpage for each wafer at every critical step.
- MeRiT AE: a mask repair system in development that will extend repair capability to the smallest defects on photomasks while maintaining high yield for advanced semiconductor processes.
Dr. Frank Rohmund, president and CEO of ZEISS Semiconductor Manufacturing Technology (SMT) and a member of the ZEISS executive board, attended the opening ceremony along with Dr. Thomas Stammler, chief technology officer; Dr. Karoline Piegdon, head of Semiconductor Fab Solutions (SFS); Dr. Clemens Neuenhahn, head of Semiconductor Mask Solutions (SMS); and Dr. Jaane Seehusen, who will be appointed head of ZEISS South Korea as of Sep 1, 2026. Representatives from the Korean semiconductor industry, the German Embassy in Korea, the European Union Chamber of Commerce Korea and the Korean-German Chamber of Commerce and Industry also attended.
Dr. Frank Rohmund said, “We are pleased to open our first global Semiconductor Innovation Center in Korea, as one of the key locations for the global chip industry. With this center we are moving ZEISS closer to our customers. We want to be a reliable, long-term partner for our customers in Korea and further deepen our collaborations.”
Dr. Jaane Seehusen, future Head of ZEISS Korea, added: “The Innovation Center in Yongin is an important step in our strategy to strengthen customer interaction in the semiconductor industry and additionally ZEISS’s overall presence in Korea.”
Source: ZEISS
About ZEISS
ZEISS is an optics and optoelectronics company founded in 1846 in Jena, Germany. It is headquartered in Oberkochen, Germany. The company develops and manufactures systems for semiconductor production, industrial metrology, microscopy, medical technology and consumer optics. Its products include lithography optics, eyeglass lenses, camera lenses and measurement equipment. ZEISS serves customers in life sciences, materials research, ophthalmology, manufacturing and semiconductor production. The company employed about 47,000 people across nearly 50 countries. It operated more than 60 sales and service sites, 40 R&D centers and 35 production facilities worldwide. Its work includes digital manufacturing, medical imaging, optical systems and semiconductor equipment. The Carl Zeiss Foundation owns the company.