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ZEISS SMT Expands Semiconductor Production in Germany

by | Jul 29, 2026

Oberkochen project adds 25,000 square metres for lithography optics, wafer fab tools and packaging systems
ZEISS SMT

OBERKOCHEN, Germany, July 29, 2026 – ZEISS Semiconductor Manufacturing Technology (SMT) has moved into a new building at its headquarters here, marking the first completed structure in a site expansion that will add about 25,000 square meters of production and production-related space. The company took occupancy in July 2026. Additional buildings will come online in phases.

ZEISS SMT supplies high-precision optics for lithography systems, including High-NA EUV, along with tools for photomask production, qualification, and repair. Its wafer fab portfolio covers inspection, metrology, and defect analysis. The company also provides equipment for advanced packaging, where multiple chips and functions are combined into integrated systems.

Beyond Oberkochen, ZEISS SMT is expanding across Germany. A multifunctional factory is under construction in Wetzlar to complement the existing site there. The Roßdorf R&D facility added 300 square meters of cleanroom space in fall 2025. In Jena, the Semiconductor Mask Solutions business unit, which builds systems for defect-free photomasks, will move into new space at the high-tech site.

“With the site expansion in Oberkochen and at our international locations, we are investing proactively in the future of the semiconductor industry,” says Dr. Frank Rohmund, president and chief executive officer of ZEISS SMT. “As part of this highly complex and investment-intensive ecosystem, we are taking responsibility and laying the groundwork for innovation, reliability, scalability and speed.”

Outside Germany, the company has opened a training center in Shanghai, added logistics infrastructure in the United States, and launched a ZEISS Innovation Center in Korea in July 2026.

Source: ZEISS

About ZEISS

ZEISS develops and manufactures optical, optoelectronic and measurement systems for industrial, medical and scientific applications. Founded in 1846 in Jena, the company is headquartered in Oberkochen, Germany. Its products include semiconductor lithography optics, industrial metrology systems, microscopes, medical equipment and eyeglass lenses. ZEISS also makes camera lenses, binoculars, spectroscopy equipment and optical components for equipment manufacturers. Its industrial systems support dimensional measurement, quality inspection, materials research and semiconductor manufacturing. Medical products support ophthalmology, microsurgery, diagnostics and treatment. Customers include semiconductor manufacturers, research institutions, hospitals, clinics, manufacturers, filmmakers, photographers and eye care professionals. ZEISS operates businesses in semiconductor manufacturing technology, industrial quality and research, medical technology and consumer markets. The company operates in about 50 countries and reported approximately 47,000 employees.