BEVERLY, MA, Aug 26, 2025 – Axcelis Technologies and GE Aerospace have launched a Joint Development Program (JDP) to develop 6.5–10kV superjunction power devices using the Purion XEmax energy implanter with beam currents up to 15MeV.
This JDP supports the ‘Advanced High Voltage Silicon Carbide Switches‘ project led by GE Aerospace as part of the Commercial Leap Ahead for Wide Bandgap Semiconductors (CLAWS) Hub, headed by North Carolina State University. The project will improve the performance of power switches.
Why are high-voltage chips getting so much attention? Silicon carbide (SiC) wide-bandgap semiconductors can handle higher voltages, hotter temperatures and faster switching than silicon (Si), reducing energy loss and shrinking power systems for aerospace, defense, AI, quantum computing and vehicles.
President and CEO Russell Low commented, “We are proud to collaborate with GE Aerospace in this endeavor, which has the potential to accelerate superjunction technology adoption. Axcelis is committed to providing equipment and process expertise that enables our customers’ superjunction device roadmaps.”
Purion XEmax offers adjustable implant energies to tune depth and dose profiles. It can reduce process steps, which lowers cost. The system also maintains controlled channeling to achieve more than 7µm of aluminum implanted depth.
GE Aerospace has developed a silicon carbide IP portfolio at its research center in Niskayuna, NY. The company sells SiC-based electric power products through its electrical power business to support avionics and electrical systems on commercial aircraft and ground vehicles. Current research targets SiC technologies for flight in environments including hypersonic platforms and space missions, and for use in electric propulsion systems.
Dr. Ljubisa Stevanovic, chief engineer at GE Aerospace Research, stated: “High voltage SiC power devices are an important enabler for a wide array of critical emerging applications and future endeavors, including hypersonic travel, electric propulsion, and space exploration. We are excited to partner with Axcelis on this project, due to their expertise in ion implantation for Silicon Carbide power devices, and their market leading portfolio of Purion high energy ion implanters.”
Source: Axcelis
About Axcelis
Axcelis Technologies, founded in 1995 and based in Beverly, MA, designs, manufactures and services capital equipment for the semiconductor industry. Its products include ion implantation systems such as high-, medium- and high-energy implanters, along with curing systems used in chip fabrication. The company’s Purion platform provides precision implantation tools, while its customer support and innovation division offers spare parts, equipment upgrades and maintenance services. Axcelis serves semiconductor manufacturers worldwide, supporting markets including power devices and memory fabs. It reported revenue of about $1B in 2024. As of year-end 2024, the company employed roughly 1,525 people globally, supporting an international customer base.
About GE Aerospace
GE Aerospace, based in Evendale, OH, traces its roots to 1892 and designs, manufactures and services jet and turboprop engines, integrated systems and components for commercial, military, business and general aviation customers worldwide. The company also provides aftermarket support, including maintenance and digital solutions. In fiscal 2024, GE Aerospace reported GAAP revenue of $38.7B. As of 2024, the company employed more than 53,000 people globally.